FEI Quanta 600 Scanning Electron Microscope Oxford X-Max EDS Detector

FEI REM

The most versatile high-resolution low vacuum REM with advanced low vacuum features
for truly challenging samples and dynamic experiments.

Technologies, materials, and samples are changing faster than ever,
just like the demands of today’s analytical laboratory.
Analytical tools must accommodate materials with very different properties
while capturing more analytical data in less time.
The demand for non-destructive analytical techniques and functions is increasing.

The Quanta series from FEI is the advanced, flexible solution for current and future diagnostic applications.
With three imaging modes - high vacuum, low vacuum, and ESEMTM - it offers the widest range of samples of all SEM systems.
It is designed to deliver maximum data - imaging and microanalysis - from all samples with or without preparation.

The new second generation of Quanta offers improved image resolution and enhanced contrast thanks to a new imaging engine,
which also supports remote operation.

Better data. More flexibility. Higher efficiency. The Quanta series offers more value for your investment.

- Enhance your imaging capabilities with high-resolution secondary electron images in high,
low, and extended vacuum (ESEM)

- Minimize switching between different detectors.
All information from the various detectors is immediately available on a single screen
from Quanta's four quadrant user interface

- Minimize sample preparation, low and ESEM vacuum capability allows for calculation-free imaging
and analysis of non-conductive and/or hydrated samples

- Enhance your analytical capabilities by conducting dynamic in-situ experiments and recording them live on video

- Enhance your analysis capabilities by enabling EDS and EBSD analysis of non-conductive samples in low vacuum,
thanks to Quanta's patented through-the-lens pumping

- Increase your flexibility and operate the microscope from any computer,
by utilizing Quanta's remote function

Key Specifications

Electron optics
• High-resolution field emission REM column,
optimized for high brightness / high current
• 45° objective geometry with differential pumping
through the lens and heated objective apertures

Resolution
• High vacuum
- 0.8 nm at 30 kV (STEM) *
- 1.2 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 1 kV (SE)
• Low vacuum
- 1.5 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
- 1.5 nm at 30 kV (SE)
• Acceleration voltage: 200 V - 30 kV
• Probe current: up to 100 nA
- continuously adjustable

Detectors
• Everhardt-Thornley-SED
• Low vacuum-SED (LFD)
• Gas-SED (GSED)
• IR-CCD
• Solid-state BSED
• Gas analytical BSED (GAD) *
• STEM *
• Scintillator BSED / CLD *
• Gas BSED *
* optional

Chamber vacuum
• High vacuum: <6e-4 Pa
• Low vacuum: 10 to 130 Pa
• ESEM vacuum: 10 to 4000 Pa

Vacuum system
• 1x 240 l / s TMP, 2x PVP
• Patented differential pumping through the lens
• Beam gas path length: 10 or 2 mm

Chamber
• 379 mm from left to right
• 10 mm analysis angle
• 10 connections
• EDX take-off angle: 35°

5-axis motor stage
• Pseudo-eccentric goniometer stage
• X, Y = 150 mm
• Z = 65 mm (Z - distance 93.5 mm)
• T = -5° to + 70° (WD dependent)
• R = 360° continuous

System control
• 32-bit user interface with Windows XP, keyboard, and optical mouse
• Image display: 19-inch LCD, SVGA 1280 x 1024
• Single image or 4-quadrant image display
• 4-quadrant live

Image processor
• Up to 4096 x 3536 pixels
• File type: TIFF (8 or 16 Bit), BMP or JPEG

Standard utilities
• Digital video recording (.avi)
• SW temperature control
• Image histogram and measurement software

Support materials
• Online help
• Quanta introductory CD

System options (optional)
• Support PC (including 2nd 19-inch LCD monitor and DVD-R/W)
• Multifunction control panel
• Image archiving software
• SW-controlled Peltier object table
• SW-controlled WETSTEM system
• SW-controlled 1000° C heating stage
• SW-controlled 1500° C heating stage
• Remote control SW
• Video printer
• Sample holder kit
• EDS
• WDS
• EBSD
• E-Beam lithography package
• CL system

Installation requirements
• Power: Voltage 230V (-6%, + 10%),
Frequency: 50 or 60 Hz (+/- 1%)
• Power consumption: <3.0 kVA for base microscope
• Ambient temperature: 20 °C (+/- 3°C),
relative humidity below 80% rF
• Stray magnetic fields
<40 nT asynchronous
<300 nT synchronous
• Acoustics: <60 dBC
• Compressed air 4-6 bar - clean, dry, and oil-free
• Only water cooling required if the room
does not meet specifications according to the instructions
before installation
• Door width: 90 cm
• Weight: Column console 570 kg
• Weight: Electrical console 139 kg

Oxford X-Max EDS Detector
Detection area: 80 mm²
Detector material: Silicon
Type: XMX0023

Year of acquisition: 2005
Last maintenance: 2017 (document available)
Type: Quanta 600

Scope of delivery: (Quanta 600 REM as shown, software with license, Oxford X-Max XMX0023, two vacuum pumps, documentation)

Condition: used

(Changes and errors in technical data, specifications are subject to change!)

Please inquire about transport options before purchase.
 
We would be happy to answer any further questions by phone.