ULVAC Dry Vacuum Pump Model LR600 new!

ULVAC Dry Vacuum Pump

Here we offer a ULVAC Dry Vacuum Pump.

ULVAC Dry Vacuum Pump

Solution for harsh process pumps

Dry Vacuum Pump

ULVAC's unique approach to utilizing latent heat in the
pump body allows the LR / HR / UR series to deliver performance
even under the most stringent processes.
ULVAC has focused its design efforts on maintaining
an extremely uniform high temperature across all pump stages
and optimized this pump family for CVD and etching applications.
Compatible with ULVAC's ECO-SHOCK system for additional energy savings

Features

The LR series pump is designed for load lock chambers and PVD processes.
ULVAC's unique aluminum design allows for very uniform temperature distribution throughout the pump body:
The ULVAC LR series pump is designed for applications requiring a heated pump, heated gas lines, and/or heated exhaust lines.
Excellent helium pumping capability
Conserving motor for safety and ease of maintenance
Withstands power interruptions of up to 500 ms.
Internal components are specially treated to ensure a high level of surface hardness and excellent corrosion resistance.
This prevents wear of internal pump parts when exposed to corrosive gases.

(Series LR)
Designed for process gases that produce powdery by-products, such as Si crystal growth furnaces
Fore pump for turbomolecular and mechanical booster pumps

Type: LR600

Condition: new

Scope of delivery: (See image)

(Changes and errors in technical data, specifications are subject to change!)
 
We would be happy to answer any further questions by phone.