SÜSS Microtec Delta 80 RC Spin Coater

SÜSS Microtec

Here we offer a Spin Coater system.

The Delta 80RC manual Spin Coater from SUSS
MicroTec is based on the well-known SUSS patented
GYRSET® closed cover coating technology. It
combines state-of-the-art technology with innovative
excellence.
The Delta 80RC can process delicate wafer fragments,
wafers up to 8" (200 mm) or substrates up to
6"x6" (150x150 mm).
The unique design of the Delta 80RC process chamber
provides better uniformity than conventional open
bowl spin coaters. At the same time, it can significantly
reduce resist consumption by up to 60% for resists like
BCB compared to conventional spin coating systems.
The Delta 80RC with GYRSET® technology is also the
ideal tool for coatings over topographies in the range
of up to 20 μm. Better uniformity and less resist con-
sumption make the SUSS Delta 80RC Spin Coater the
ideal tool regarding cost of ownership.
The SUSS Delta 80RC Spin Coater is simple to
operate with fully programmable process parame-
ters. The system is available as a bench-mounted
module or for standalone operation integrated into
an attractive stainless steel cabinet. A variety of
options are available.

Condition: used

Type: Delta 80 RC

Scope of delivery: (See image)
 
Further questions can be answered by phone.

Written orders possible via email or fax