Fries Research & Technology FRT MicroProf® MPR 1250 Surface Measurement System

Fries Research & Technology

Device designation: FRT MicroProf® MPR 1250

The FRT MicroProf® MPR 1250 is a high-precision surface measurement system
from the MicroProf® series by Fries Research & Technology GmbH (FRT).
These systems are designed for non-destructive and contactless analysis of
surface parameters such as topography, roughness, layer thickness, and more.

Features of the FRT MicroProf:

Device details:

Model: FRT MicroProf® MPR1250
Article number: 200 00
Sensor type: CWL 300 µm
Serial number: 0904001
Measurement principle: Chromatic confocal point sensor
Light source: Halogen lamp, white light
Vertical resolution: up to 3 nm
Measurement accuracy (Z): 100 nm
Lateral resolution (XY): 2.5 µm
Measurement angle to surface: 90° ±30°
Max. sample size: approx. 310 x 310 x 50 mm

Technical specifications (excerpt):

XY table:

Type: compact XY cross table
Travel range (measuring range): 200 x 200 mm
Guidance: mechanical cross roller guide
Drive: DC motor with ball screw
Position measurement system: Heidenhain glass scale with reference mark
Measurement system resolution: 0.2 µm
Repeatability: < ±1 µm
Right angle XY: < 4 µm / 200 mm
Height deviation (per axis): < 2 µm / 200 mm
Z-axis (motorized):

Type: Linear axis

Travel range: 50 mm (optional 100 mm)
Drive: stepper motor with spindle drive
Side deviation: < 2 µm / 50 mm
Manual coarse adjustment (optional):
Type: dovetail guide
Adjustment range: up to 300 mm sample height

Measurement:

Minimal point distance (XY): 0.6 µm
Sample size: approx. 310 x 310 x 50 mm
Max. sample weight: 5 kg (optional 10 kg)
Measurement speed: 1 µm/s to max. 100 mm/s

System:

Total weight: approx. 275 kg (measuring setup: 225 kg)
Footprint of measuring setup: approx. 0.9 x 0.8 m
Dimensions of control unit (W x D x H): approx. 0.55 x 0.53 x 0.32 m
Power supply (EU/US): 110–240 V, 50–60 Hz, 16 A
Power consumption: approx. 300–400 W

Operating conditions:
Temperature range: 22 °C ±5 °C
Temperature stability: < 0.5 °C

Weight approx. 500 kg

Condition:
The device is in very good technical and optical condition.
All axes move precisely and smoothly.

Scope of delivery:

MicroProf® MPR200 00 XY measurement system
Control unit
Connection cable

(Changes and errors in the technical data, specifications are reserved!)

Inspection & testing on-site possible by arrangement.

Further questions can be answered by phone.