Edwards Dry Pump iXL500Q 500 m³/h

Edwards Dry Pump

Here we offer an Edwards dry pump.

The iXL product family of dry pumps covers the entire spectrum of
pumping requirements for the flat panel display (FPD) and solar industries - from the
smaller load locks of generation 4 to the largest of
generation 8 or 10.
These powerful pumps are designed for maximum substrate throughput
while minimizing power, footprint, and weight.

Dry pump size m³/h: 500
Booster size m³/h: 1800
max. vacuum (typical) mbar: <5x10-3
max. system power kW: 7.0
Input connection ISO: 160
Output connection NW: 50
Water flow l/min: 11
Cleaning slm: 4
Weight kg: 740

Example pumping times:
Pumping time to 0.1 mbar (sec.) (5 min. pre-run, ISO 160)

at chamber volume:
300: 16
600: 27
800: 34

Dimensions:
Width x Depth x Height mm: 517 x 1186 x 966

Type: iXL500Q

Condition: new / unused

Scope of delivery: (1x iXL500Q original packaging)

(Changes and errors in technical data are reserved!)
 
We would be happy to answer any further questions by phone.